3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
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3M Products & Supplies

3M Betapure AUL Series Filter Capsules AULZ15SF5Y02RC, 2 in, .005 um, 6/Case

Sold As: 6-Pack
SKU: 7100206411
Lead Time: 112 working days.
UPC: 00638060344224
3M ID: 70020350412
Shelf Life: 1825 Days
$466.86 ($77.81 / Count)
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Product Description  
3M Betapure AUL Series Filter Capsules contain 3M Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.

Extra Details

  • Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration

Data Sheet

  1. Tech Data Sheet

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