3M Betapure AUL Series Filter Cartridge AUL10Z15FCSF5
3M Betapure AUL Series Filter Cartridge AUL10Z15FCSF5
3M Betapure AUL Series Filter Cartridge AUL10Z15FCSF5
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3M Products & Supplies

3M Betapure AUL Series Filter Cartridge AUL10Z15FCSF5, 10 in, SOE, EPR, 30/Case

Sold As: 30-Pack
SKU: 7100179211
Lead Time: 112 working days.
UPC: 00638060375709
3M ID: 70020348838
$1,878.04 ($62.60 / Count)
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Product Description  
3M Betapure AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Extra Details

  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Data Sheet

  1. Tech Data Sheet

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