3M Betapure AUL Series Filter Cartridge
3M Betapure AUL Series Filter Cartridge
3M Betapure AUL Series Filter Cartridge
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3M Products & Supplies

3M Betapure AUL Series Filter Cartridge AUL30Z15FCSF5-DG2, 30 in, 0.05 um, 15/Case

Sold As: 15-Pack
SKU: 7100245742
Lead Time: 112 working days.
UPC: 00638060358580
3M ID: 70020353671
$1,690.23 ($112.68 / Count)
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Product Description  
3M Betapure AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Extra Details

  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Data Sheet

  1. Tech Data Sheet

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